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Thermal Stabilization of Hole Channel on H-Terminated Diamond Surface by Using Atomic-Layer-Deposited Al2O3 Overlayer and its Electric Properties « Scientific Information « Technology
 
Fri, 17 Feb 2012, 4:49am #1
devotEE
EEndearing
Devo_duty_now
Registered: Oct, 2008
Last visit: Wed, 09 Apr 2014
Posts: 862

Hot off my Inbox.

http://theeestory.com/files/H_terminated_Diamon...

Powerful.

"we deposited a 10-nm-thick Al2O3 overlayer by
atomic layer deposition in the atomic layer-by-layer mode at 80 deg C. Thus, trimethylaluminum (TMAl) as Al source and H2O as O source were supplied repeatedly. The Al2O3
overlayer passivated the NO2-adsorbed H-terminated diamond
surface successfully, as described later. The details
of properties of its Al2O3 overlayer will be reported
elsewhere. At present, we estimated a composition ratio of
Al : O of approximately 2 : 3, and critical field strength Ec of at ~7 MV/cm from gate breakdown measurements, and a gate leakage current of 4 x 10^-9 A/mm2, 250 times lower than that of FET with a native oxide."

must be a Wizard "There are some who call me Tim...."

Last edited Fri, 17 Feb 2012, 4:43pm by devotEE


"We're living in a wiggly world."

"11% of any quantity = a shit ton"

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Fri, 17 Feb 2012, 4:57pm #2
devotEE
EEndearing
Devo_duty_now
Registered: Oct, 2008
Last visit: Wed, 09 Apr 2014
Posts: 862

Hello,
In case you missed it, that is 700 volts/micron with 1/250 of the leakage of an uncoated (no ALD) FET. Yes, thinner layers have a higher specific strength, but that is still impressive. Also note earlier in the paper that the diamond was reported with a specific strength of 1000 volts / micron. Double bonds uber alles. Kind of like CMBT.

I'm not sayin, I'm just sayin...


"We're living in a wiggly world."

"11% of any quantity = a shit ton"

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Sat, 18 Feb 2012, 11:29pm #3
Daniel R Plante
EEcclesiastical
Troll_smoke
Registered: Apr, 2009
Last visit: Thu, 04 Apr 2013
Posts: 1185


Nope, I didn't miss it. Thanks for all the very relevant references lately devotEE. I look forward to them :)

Maybe you should email EEventually about this one. He probably already read it, but who knows?


daniel_r_plante@hotmail.com
Programmer, Applied Science Technologist (AScT). Automated Test Engineering (ATE), shop 153, CFB Esquimalt, Box 17000 Station Forces, Victoria, BC, Canada V9A 7N2. My direct line: (250) 363-2061. Home: (250) 382-0068

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